********************** Process Specifications ********************** .. rst-class:: center **IHP Open Source PDK** **130nm BiCMOS Technology** **IHP-SG13G2** **Process Specifications** **Rev. 1.2** .. only:: html .. toctree:: :numbered: :caption: Contents 01_general 02_process_control_params 03_bjt_params 04_meas_cond 05_change_history 06_known_issues .. .. only:: latex .. .. raw:: latex .. \includepdf[pages=-]{/home/docs/checkouts/readthedocs.org/user_builds/ihp-ihp-open-pdk-docs/checkouts/latest/docs/_static/SG13G2_os_process_spec.pdf}