2. Layer Table

This chapter is a documentation of IHP layers definition which is valid in all technologies.

Tip

Only the layers described in the following table are allowed to be used in layout designs. Do not use layers exclusively reserved for internal usage.

List of abbreviations

Layer Name

Purpose

GDS Number

GDS Datatype

Description

Activ

drawing

1

0

Defines active regions in substrate, where transistors, diodes and/or capacitors will be fabricated

Activ

pin

1

2

Activ pin layer

Activ

mask

1

20

added to Active: drawing at mask generation

Activ

filler

1

22

Activ filler layer

Activ

nofill

1

23

Activ filler exclusion layer

Activ

OPC

1

26

Activ outer OPC definition layer

Activ

iOPC

1

27

Activ inner OPC definition layer

Activ

noqrc

1

28

No parasitics extraction

BiWind

drawing

3

0

Defines active npn collector region

BiWind

OPC

3

26

BiWindOPCdefinition layer

GatPoly

drawing

5

0

Defines poly silicon gates and interconnect

GatPoly

pin

5

2

GatPoly pin layer

GatPoly

filler

5

22

GatPoly filler layer

GatPoly

nofill

5

23

GatPoly filler exclusion layer

GatPoly

OPC

5

26

GatPoly outer OPC definition layer

GatPoly

iOPC

5

27

GatPoly inner OPC definition layer

GatPoly

noqrc

5

28

No parasitics extraction

Cont

drawing

6

0

Defines 1-st metal contacts to Activ, GatPoly

Cont

OPC

6

26

Cont OPC definition layer

nSD

drawing

7

0

Defines areas to receive N+ source/drain implant

nSD

block

7

21

Defines areas which do not receive S/D implants

Metal1

drawing

8

0

Defines 1-st metal interconnect

Metal1

pin

8

2

Metal1 pin layer

Metal1

mask

8

20

added to Metal1: drawing at mask generation

Metal1

filler

8

22

Metal1 filler layer

Metal1

nofill

8

23

Metal1 filler exclusion layer

Metal1

slit

8

24

Metal1 slit definition layer

Metal1

text

8

25

Text layer for Metal1, used for LVS

Metal1

OPC

8

26

Metal1 OPC definition layer

Metal1

noqrc

8

28

No parasitics extraction

Metal1

res

8

29

Wire resistor

Metal1

iprobe

8

33

Current probe

Metal1

diffprb

8

34

Differential current probe

Passiv

drawing

9

0

Defines regions where passivation coating is removed

Passiv

pin

9

2

Passiv pin layer

Passiv

sbump

9

36

Defines passivation openings for solder bump bonding

Passiv

pillar

9

35

Defines passivation openings for copper pillar formation

Passiv

pdl

9

40

Plasma dicing line

Metal2

drawing

10

0

Defines 2-nd metal interconnect

Metal2

pin

10

2

Metal2 pin layer

Metal2

mask

10

20

added to Metal2: drawing at mask generation

Metal2

filler

10

22

Metal2 filler layer

Metal2

nofill

10

23

Metal2 filler exclusion layer

Metal2

slit

10

24

Metal2 slit definition layer

Metal2

text

10

25

Text layer for Metal2, used for LVS

Metal2

OPC

10

26

Metal2 OPC definition layer

Metal2

noqrc

10

28

No parasitics extraction

Metal2

res

10

29

Wire resistor

Metal2

iprobe

10

33

Current probe

Metal2

diffprb

10

34

Differential Current probe

BasPoly

drawing

13

0

Defines npn base poly region

BasPoly

pin

13

2

BasPoly pin layer

pSD

drawing

14

0

Defines areas to receive P+ source/drain implant

NLDB

drawing

15

0

Reserved for internal LDMOS development

DigiBnd

drawing

16

0

surrounds areas were digital DRC is valid

Via1

drawing

19

0

Defines 1-st metal to 2-nd metal contact

BackMetal1

drawing

20

0

Defines 1-st back-side metal interconnect

BackMetal1

pin

20

2

BackMetal1 pin layer

BackMetal1

mask

20

20

added to BackMetal1: drawing at mask generation

BackMetal1

filler

20

22

BackMetal1 filler layer

BackMetal1

nofill

20

23

BackMetal1 filler exclusion layer

BackMetal1

slit

20

24

BackMetal1 slit definition layer

BackMetal1

text

20

25

Text layer for BackMetal1, used for LVS

BackMetal1

OPC

20

26

BackMetal1 OPC definition layer

BackMetal1

noqrc

20

28

No parasitics extraction

BackMetal1

res

20

29

Wire resistor

BackMetal1

iprobe

20

33

Current probe

BackMetal1

diffprb

20

34

Differential Current probe

BackPassiv

drawing

23

0

Defines regions where passivation coating is removed

RES

drawing

24

0

Identifies resistor areas

SRAM

drawing

25

0

Identifies memory areas

TRANS

drawing

26

0

Identifies bipolar transistor areas

IND

drawing

27

0

Identifies inductor areas

IND

pin

27

2

IND pin layer

IND

text

27

25

IND text layer

SalBlock

drawing

28

0

Defines non salicided Activ and GatPoly, BasPoly areas

Via2

drawing

29

0

Defines 2-nd metal to 3-rd metal contact

Metal3

drawing

30

0

Defines 3-rd metal interconnect

Metal3

pin

30

2

Metal3 pin layer

Metal3

mask

30

20

added to Metal3: drawing at mask generation

Metal3

filler

30

22

Metal3 filler layer

Metal3

nofill

30

23

Metal3 filler exclusion layer

Metal3

slit

30

24

Metal3 slit definition layer

Metal3

text

30

25

Text layer for Metal3, used for LVS

Metal3

OPC

30

26

Metal3 OPC definition layer

Metal3

noqrc

30

28

No parasitics extraction

Metal3

res

30

29

Wire resistor

Metal3

iprobe

30

33

Current probe

Metal3

diffprb

30

34

Differential Current probe

NWell

drawing

31

0

Defines the regions that receive P-Channel VT adjust, P-Channel Punch-Through and N-Well implants

NWell

pin

31

2

NWell pin layer

nBuLay

drawing

32

0

Defines bipolar sub collector and isolated NMOS devices

nBuLay

pin

32

2

nBuLay pin layer

nBuLay

block

32

21

Defines areas where non BuLay implantis allowed

EmWind

drawing

33

0

Defines npn emitter window

EmWind

OPC

33

26

EmWind OPC definition layer

DeepCo

drawing

35

0

Defines deep collector regions

MIM

drawing

36

0

Defines Metal-Insulator-Metal capacitor area

EdgeSeal

drawing

39

0

EdgeSeal definition layer,reserved for internal use only

Substrate

drawing

40

0

Substrate recognition layer for LVS

Substrate

text

40

25

Substrate recognition text for LVS

dfpad

drawing

41

0

Pad recognition layer

dfpad

pillar

41

35

Copper pillar pad recognition layer

dfpad

sbump

41

36

Solder bump pad recognition layer

ThickGateOx

drawing

44

0

Thick Gate Oxide

PLDB

drawing

45

0

Reserved for internal LDMOS development

PWell

drawing

46

0

Reserved for internal use

PWell

pin

46

2

Pwell pin layer

PWell

block

46

21

Defines areas where no well implants are allowed PWL:=NOT(NWell OR PWell::Block)

IC

drawing

48

0

Reserved for internal use

Via3

drawing

49

0

Defines 3-rd metal to 4-th metal contact

Metal4

drawing

50

0

Defines 4-th metal interconnect

Metal4

pin

50

2

Metal4 pin layer

Metal4

mask

50

20

added to Metal4: drawing at mask generation

Metal4

filler

50

22

Metal4filler layer

Metal4

nofill

50

23

Metal4filler exclusion layer

Metal4

slit

50

24

Metal4slit definition layer

Metal4

text

50

25

Text layer for Metal4, used for LVS

Metal4

OPC

50

26

Metal4 OPC definition layer

Metal4

noqrc

50

28

No parasitics extraction

Metal4

res

50

29

Wire resistor

Metal4

iprobe

50

33

Current probe

Metal4

diffprb

50

34

Differential Current probe

HeatTrans

drawing

51

0

Defines heat source for transistors

HeatRes

drawing

52

0

Defines heat source for resistors

FBE

drawing

54

0

Fluidic back side etch

EmPoly

drawing

55

0

Defines npn emitter poly region and pnp basepoly region

DigiSub

drawing

60

0

Substrate recognition layer for LVS

NoDRC

drawing

62

0

Excludes areas from design rule checking. Designs with NoDRC are rejected!

TEXT

drawing

63

0

Macro cell name, element text layer

Via4

drawing

66

0

Defines 4-th metal to 5-th metal contact

Metal5

drawing

67

0

Defines 5-th metal interconnect

Metal5

pin

67

2

Metal5 pin layer

Metal5

mask

67

20

added to Metal5: drawing at mask generation

Metal5

filler

67

22

Metal5 filler layer

Metal5

nofill

67

23

Metal5 filler exclusion layer

Metal5

slit

67

24

Metal5 slit definition layer

Metal5

text

67

25

Text layer for Metal5

Metal5

OPC

67

26

Metal5 OPC definition layer

Metal5

noqrc

67

28

No parasitics extraction

Metal5

res

67

29

Wire resistor

Metal5

iprobe

67

33

Current probe

Metal5

diffprb

67

34

Differential Current probe

RadHard

drawing

68

0

Defines regions where special radiation hard design rules are applied

MemCap

drawing

69

0

Defines position of RFMEMS cap

Varicap

drawing

70

0

Well implant for varicap devices

IntBondVia

drawing

72

0

Via on top of interposer’s TopMetal2

IntBondMet

drawing

73

0

Metal connected to IntBondVia

DevBondVia

drawing

74

0

Via on top of device’s TopMetal2

DevBondMet

drawing

75

0

Metal connected to DevBondVia

DevTrench

drawing

76

0

Deep trench from front side for plasma dicing approach

Redist

drawing

77

0

Redistribution layer for metal wiring after chip IO

GraphBot

drawing

78

0

1st graphene layer

GraphTop

drawing

79

0

2nd graphene layer

AntVia1

drawing

83

0

Deep via between TopMetal2 and AntMetal1

AntMetal2

drawing

84

0

Extra second-metal layer for antenna and passive integration

GraphCont

drawing

85

0

GraphBot, GraphTop and GraphGat to GraphMetal1 or GraphMet1L contact

SiWG

drawing

86

0

Backend integrated Si waveguide

SiWG

filler

86

22

SiWG filler layer

SiWG

nofill

86

23

SiWG filler exclusion layer

SiGrating

drawing

87

0

Si waveguide etching layer

SiNGrating

drawing

88

0

SiN waveguide etching layer

GraphPas

drawing

89

0

Additional passivation for graphene structures

EmWind3

drawing

90

0

Defines G3 npn emitter window

EmWiHV3

drawing

91

0

Defines G3 HV npn emitter window

RedBuLay

drawing

92

0

Burried Layer with reduced dose for isolated NLDMOS

SMOS

drawing

93

0

Extraction recognition layer for special CMOS devices

GraphPad

drawing

97

0

Passivation opening

Polimide

drawing

98

0

Reserved for future use

Polimide

pin

98

2

Polimide pin layer

Recog

drawing

99

0

general device recognition shape for device extraction

Recog

pin

99

2

General device pin recognition layer

Recog

esd

99

30

ESD device recognition layer

Recog

diode

99

31

Active diode recognition layer

Recog

tsv

99

32

TSV device recognition layer

Recog

iprobe

99

33

Current probe

Recog

diffprb

99

34

Differential Current probe

Recog

pillar

99

35

Copper pillar pad recognition layer

Recog

sbump

99

36

Solder bump pad recognition layer

Recog

otp

99

37

OTP device recognition layer

Recog

pdiode

99

38

Enables extraction of parasitic diodes

Recog

mom

99

39

Metal-on-metal (MOM) capacitor recognition layer

Recog

pcm

99

100

Process control structure recognition layer

ColOpen

drawing

101

0

Defines additional collector opening in SG13 HBTs

GraphMetal1

drawing

109

0

Graphene-metal standard interconnect

GraphMetal1

filler

109

22

GraphMetal1 filler layer

GraphMetal1

nofill

109

23

GraphMetal1 filler exclusion layer

GraphMetal1

slit

109

24

GraphMetal1 slit definition layer

GraphMetal1

OPC

109

26

Graphene-metal opc

GraphMet1L

drawing

110

0

Graphene-metal lift-off interconnect

GraphMet1L

filler

110

22

GraphMet1L filler layer

GraphMet1L

nofill

110

23

GraphMet1L filler exclusion layer

GraphMet1L

slit

110

24

GraphMet1L slit definition layer

GraphMet1L

OPC

110

26

Graphene-metal lift-off opc

EXTBlock

drawing

111

0

Block tip and halo implants

NLDD

drawing

112

0

Dedicated pwell body for NLDMOS

PLDD

drawing

113

0

Dedicated nwell body for PLDMOS

NExt

drawing

114

0

Reserved for internal LDMOS development

PExt

drawing

115

0

Reserved for internal use

NExtHV

drawing

116

0

Reserved for internal use

PExtHV

drawing

117

0

Reserved for internal use

GraphGate

drawing

118

0

Graphene GFET gate

SiNWG

drawing

119

0

Backend integrated SiN waveguide

SiNWG

filler

119

22

SiNWG filler layer

SiNWG

nofill

119

23

SiNWG filler exclusion layer

MEMPAD

drawing

124

0

Dedicated to open Pads in RF-MEMS module

TopVia1

drawing

125

0

Defines 3-rd (or 5-th) metal to TopMetal1 contact

TopMetal1

drawing

126

0

Defines 1-st thick TopMetal layer

TopMetal1

pin

126

2

TopMetal1 pin layer

TopMetal1

mask

126

20

Added to TopMetal1: drawing at mask generation

TopMetal1

filler

126

22

TopMetal1 filler layer

TopMetal1

nofill

126

23

TopMetal1 filler exclusion layer

TopMetal1

slit

126

24

TopMetal1 slit definition layer

TopMetal1

text

126

25

Text layer forTopMetal1, used for LVS

TopMetal1

noqrc

126

28

No parasitics extraction

TopMetal1

res

126

29

Wire resistor

TopMetal1

iprobe

126

33

Current probe

TopMetal1

diffprb

126

34

Differential Current probe

INLDPWL

drawing

127

0

Dedicated PWell body for isolated NLDMOS

PolyRes

drawing

128

0

used to mark net resistors

PolyRes

pin

128

2

Defines polysilicon gates and interconnect

Vmim

drawing

129

0

used to mark net mim capacitors

nBuLayCut

drawing

131

0

P-separation implat INLDMOS (internal use)

AntMetal1

drawing

132

0

Extra first-metal layer for antenna and passive integration

TopVia2

drawing

133

0

Defines via between TopMetal1 and TopMetal2

TopMetal2

drawing

134

0

Defines 2-nd thick TopMetal layer

TopMetal2

pin

134

2

TopMetal2 pin layer

TopMetal2

mask

134

20

added to TopMetal2: drawing at mask generation

TopMetal2

filler

134

22

Top Metal2 filler layer

TopMetal2

nofill

134

23

Top Metal2 filler exclusion layer

TopMetal2

slit

134

24

TopMetal2 slit definition layer

TopMetal2

text

134

25

Text layer forTopMetal2

TopMetal2

noqrc

134

28

No parasitics extraction

TopMetal2

res

134

29

Wire resistor

TopMetal2

iprobe

134

33

Current probe

TopMetal2

diffprb

134

34

Differential Current probe

SNSRing

drawing

135

0

Sensor package ring

Sensor

drawing

136

0

Sensor recognition layer

SNSArms

drawing

137

0

Arms of the Sensor

SNSCMOSVia

drawing

138

0

Defines via between BiCMOS wafer and sensor

ColWind

drawing

139

0

Defines enclosed active transistor region

FLM

drawing

142

0

Defines fluidic channel

HafniumOx

drawing

143

0

MEMRES dielectric layer

MEMVia

drawing

145

0

Local Vias within RFM area

ThinFilmRes

drawing

146

0

ThinFilmRes(V) and recognition layer for RFMEMS

RFMEM

drawing

147

0

Areas for integrated RFMEMS devices

NoRCX

drawing

148

0

No parasitics extraction

NoRCX

m2m3

148

41

No parasitics extraction in Metal2 and Metal3

NoRCX

m2m4

148

42

No parasitics extraction in Metal2 and Metal4

NoRCX

m2m5

148

43

No parasitics extraction in Metal2 and Metal5

NoRCX

m2tm1

148

44

No parasitics extraction in Metal2 and TopMetal1

NoRCX

m2tm2

148

45

No parasitics extraction in Metal2 and TopMetal2

NoRCX

m3m4

148

46

No parasitics extraction in Metal3 and Metal4

NoRCX

m3m5

148

47

No parasitics extraction in Metal3 and Metal5

NoRCX

m3tm1

148

48

No parasitics extraction in Metal3 and TopMetal1

NoRCX

m3tm2

148

49

No parasitics extraction in Metal3 and TopMetal2

NoRCX

m4m5

148

50

No parasitics extraction in Metal4 and Metal5

NoRCX

m4tm1

148

51

No parasitics extraction in Metal4 and TopMetal1

NoRCX

m4tm2

148

52

No parasitics extraction in Metal4 and TopMetal2

NoRCX

m5tm1

148

53

No parasitics extraction in Metal5 and TopMetal1

NoRCX

m5tm2

148

54

No parasitics extraction in Metal5 and TopMetal2

NoRCX

tm1tm2

148

55

No parasitics extraction in TopMetal1and TopMetal2

NoRCX

m1sub

148

123

No parasitics extraction in Metal1 and Substrate

NoRCX

m2sub

148

124

No parasitics extraction in Metal2 and Substrate

NoRCX

m3sub

148

125

No parasitics extraction in Metal3 and Substrate

NoRCX

m4sub

148

126

No parasitics extraction in Metal4 and Substrate

NoRCX

m5sub

148

127

No parasitics extraction in Metal5 and Substrate

NoRCX

tm1sub

148

300

No parasitics extraction in TopMetal1 and Substrate

NoRCX

tm2sub

148

301

No parasitics extraction in TopMetal2 and Substrate

SNSBotVia

drawing

149

0

Sensor bottom via

SNSTopVia

drawing

151

0

Sensor top via

DeepVia

drawing

152

0

Through Silicon Via

FGEtch

drawing

153

0

At this place the 1-st poly-Si layer (floating-gate) is etched before the 2-nd poly-Si layer (control-gate) is deposited

CtrGat

drawing

154

0

This layer patterns the 2-nd poly-Si layer (control-gate)

FGImp

drawing

155

0

Defines areas where the Floating-gate is doped and the p-well of the flash-cells is formed

EmWiHV

drawing

156

0

EmWind layer for high voltage HBT

LBE

drawing

157

0

For localized back side etch

AlCuStop

drawing

159

0

Reserved for internal use

NoMetFiller

drawing

160

0

Exclude all metall filler

prBoundary

drawing

189

0

Defines boundary of layout cells

Exchange0

drawing

190

0

Support layer for layout data exchange (not used in mask preparation)

Exchange0

pin

190

2

pin layer of Exchange0

Exchange0

text

190

25

Text layer of Exchange0

Exchange1

drawing

191

0

Support layer for layout data exchange (not used in mask preparation)

Exchange1

pin

191

2

pin layer of Exchange1

Exchange1

text

191

25

Text layer of Exchange1

Exchange2

drawing

192

0

Support layer for layout data exchange (not used in mask preparation)

Exchange2

pin

192

2

pin layer of Exchange2

Exchange2

text

192

25

Text layer of Exchange2

Exchange3

drawing

193

0

Support layer for layout data exchange (not used in mask preparation)

Exchange3

pin

193

2

pin layer of Exchange3

Exchange3

text

193

25

Text layer of Exchange3

Exchange4

drawing

194

0

Support layer for layout data exchange (not used in mask preparation)

Exchange4

pin

194

2

pin layer of Exchange4

Exchange4

text

194

25

Text layer of Exchange4

isoNWell

drawing

257

0

Defines regions with alternative NWell implant to form isolated NWell