IHP 130nm BiCMOS Open Source PDK
PDK Contents
Installation
Process Specifications
Layout Rules
Analog Design
Digital Design
Chip Finishing
Physical & Design Verification
EM Simulation
EM Simulation Overview
Introduction
S-Parameter port de-embedding
Lumped model and SPICE model extraction
Viewing S-simulation results
GDSII geometry cleanup prior to simulation
Some example simulations
Contribution
References
IHP 130nm BiCMOS Open Source PDK
EM Simulation
EM Simulation Overview for IHP SG13G2 OPDK
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EM Simulation Overview for IHP SG13G2 OPDK
February 2026
Contents
Introduction
Solver methods
Which solver method is better for my model?
Workflows using Python model script
gds2openEMS workflow (FDTD)
gds2palace workflow (FEM)
Graphical user interface: EMStudio
Graphical user interface: setupEM
S-Parameter port de-embedding
Port de-embedding in Palace workflow
Port de-embedding in openEMS workflow
Lumped model and SPICE model extraction
Lumped model fit
Black box vector fit
Viewing S-simulation results
S-parameter viewer in qucs-s
Python script „plot_snp“
Python script „plot_inductor“
GDSII geometry cleanup prior to simulation
gds_removefill
gds_simplify
gds_prepare_for_EM
Some example simulations
mpa_core
OpenEMS simulation
Palace simulation
Inductor 400pH @ 40 GHz
OpenEMS simulation
Palace simulation
Butler matrix 93 GHz
OpenEMS simulation
Palace simulation
Stacked Technology using openEMS flow