1. Precheck (Minimal) DRC rules

Tip

These are used for rejection tests during the pre-tapeout checks.

1.1. Activ (not in BEOL)

Name

Description

Value (um)

Act.a

Min. Activ width

0.15

Act.b

Min. Activ space or notch

0.21

1.2. Activ Filler (not in BEOL)

Name

Description

Value (um)

AFil.c1

AFil.c1 Min. Activ:filler space to Activ

0.42

1.3. Thick Gate Oxide (not in BEOL)

Name

Description

Value (um)

TGO.f

Min. ThickGateOx width

0.86

1.4. GatPoly (not in BEOL)

Name

Description

Value (um)

Gat.a

Min. GatPoly width

0.13

Gat.b

Min. GatPoly space or notch

0.18

Gat.d

Min. GatPoly space to Activ

0.07

1.5. GatPoly Filler (not in BEOL)

Name

Description

Value (um)

GFil.d

GFil.d Min. GatPoly:filler space to Activ, GatPoly, Cont, pSD, nSD:block, SalBlock

1.1

1.6. Cont (not in BEOL)

Name

Description

Value (um)

Cnt.a

Min. and max. Cont width

0.16

Cnt.b

Min. Cont space

0.18

1.7. Metal

Name

Description

Value (um)

M1.a

Min. Metal1 width

0.16

M1.b

Min. Metal1 space or notch

0.18

M2.a

Min. Metal2 width

0.2

M2.b

Min. Metal2 space or notch

0.21

M3.a

Min. Metal3 width

0.2

M3.b

Min. Metal3 space or notch

0.21

M4.a

Min. Metal4 width

0.2

M4.b

Min. Metal4 space or notch

0.21

M5.a

Min. Metal5 width

0.2

M5.b

Min. Metal5 space or notch

0.21

1.8. Metal Filler

Name

Description

Value (um)

M1Fil.c

M1Fil.c Min. Metal1:filler space to Metal1

0.42

M2Fil.c

M2Fil.c Min. Metal2:filler space to Metal2

0.42

M3Fil.c

M3Fil.c Min. Metal3:filler space to Metal3

0.42

M4Fil.c

M4Fil.c Min. Metal4:filler space to Metal4

0.42

M5Fil.c

M5Fil.c Min. Metal5:filler space to Metal5

0.42

1.9. Via

Name

Description

Value (um)

V1.a

Min. and max. Via1 width

0.19

V1.b

Min. Via1 space

0.22

V2.a

Min. and max. Via2 width

0.19

V2.b

Min. Via2 space

0.22

V3.a

Min. and max. Via3 width

0.19

V3.b

Min. Via3 space

0.22

V4.a

Min. and max. Via4 width

0.19

V4.b

Min. Via4 space

0.22

1.10. TopVia1

Name

Description

Value (um)

TV1.a

Min. and max. TopVia1 width

0.42

TV1.b

Min. TopVia1 space

0.42

1.11. TopMetal1

Name

Description

Value (um)

TM1.a

Min. TopMetal1 width

1.64

TM1.b

Min. TopMetal1 space or notch

1.64

1.12. TopVia2

Name

Description

Value (um)

TV2.a

Min. and max. TopVia2 width

0.9

TV2.b

Min. TopVia2 space

1.06

1.13. TopMetal2

Name

Description

Value (um)

TM2.a

Min. TopMetal2 width

2

TM2.b

Min. TopMetal2 space or notch

2

1.14. TopMetal Filler

Name

Description

Value (um)

TM1Fil.c

TM1Fil.c Min. TopMetal1:filler space to TopMetal1

3

TM2Fil.c

5.26. TM2Fil.c Min. TopMetal2:filler space to TopMetal2

3

1.15. Passiv

Name

Description

Value (um)

Pas.a

Min. Passiv width

2.1

Pas.b

Min. Passiv space or notch

3.5

1.16. Density rules

1.16.1. Front-end density rules

Name

Description

Value (um)

GFil.g

GFil.g Min. global GatPoly density [%]

15

AFil.g

AFil.g Min. global Activ density [%]

35

AFil.g1

AFil.g1 Max. global Activ density [%]

55

AFil.g2

AFil.g2 Min. Activ coverage ratio for any 800 x 800 µm² chip area [%]

25

AFil.g3

AFil.g3 Max. Activ coverage ratio for any 800 x 800 µm² chip area [%]

65

1.16.2. Back-end density rules

Name

Description

Value (um)

M1.j

Min. global Metal1 density [%]

35

M1.k

Max. global Metal1 density [%]

60

M2.j

Min. global Metal2 density [%]

35

M2.k

Max. global Metal2 density [%]

60

M3.j

Min. global Metal3 density [%]

35

M3.k

Max. global Metal3 density [%]

60

M4.j

Min. global Metal4 density [%]

35

M4.k

Max. global Metal4 density [%]

60

M5.j

Min. global Metal5 density [%]

35

M5.k

Max. global Metal5 density [%]

60

M1Fil.h

Min. Metal1 and Metal1:filler coverage ratio for any 800 x 800 µm² chip area [%]

25

M1Fil.k

Max. Metal1 and Metal1:filler coverage ratio for any 800 x 800 µm² chip area [%]

75

M2Fil.h

Min. Metal2 and Metal2:filler coverage ratio for any 800 x 800 µm² chip area [%]

25

M2Fil.k

Max. Metal2 and Metal2:filler coverage ratio for any 800 x 800 µm² chip area [%]

75

M3Fil.h

Min. Metal3 and Metal3:filler coverage ratio for any 800 x 800 µm² chip area [%]

25

M3Fil.k

Max. Metal3 and Metal3:filler coverage ratio for any 800 x 800 µm² chip area [%]

75

M4Fil.h

Min. Metal4 and Metal4:filler coverage ratio for any 800 x 800 µm² chip area [%]

25

M4Fil.k

Max. Metal4 and Metal4:filler coverage ratio for any 800 x 800 µm² chip area [%]

75

M5Fil.h

Min. Metal5 and Metal5:filler coverage ratio for any 800 x 800 µm² chip area [%]

25

M5Fil.k

Max. Metal5 and Metal5:filler coverage ratio for any 800 x 800 µm² chip area [%]

75

TM1.c

Min. global TopMetal1 density [%]

25

TM1.d

Max. global TopMetal1 density [%]

75

TM2.c

Min. global TopMetal2 density [%]

25

TM2.d

Max. global TopMetal2 density [%]

75

1.17. LBE

Name

Description

Value (um)

LBE.a

Min. LBE width

100

LBE.b

Max. LBE width

1500

LBE.b1

Max. LBE area (µm²)

250000

LBE.c

Min. LBE space or notch

100

LBE.d

Min. LBE space to inner edge of EdgeSeal

150

LBE.h

No LBE ring allowed

LBE.i

Max. global LBE density [%]

20

1.18. Pad Dimensions

Name

Description

Value (um)

Pad.m

SBumpPad and CuPillarPad in same layout not allowed

1.18.1. Solder Bump Rules

Name

Description

Value (um)

Padb.a

Min. SBumpPad size

60

Padb.b

Min. SBumpPad space

70

Padb.c

Min. TopMetal2 (within dfpad) enclosure of SBumpPad

10

1.18.2. Copper Pillar Rules

Name

Description

Value (um)

Padc.a

Min. CuPillarPad size

35

Padc.b

Min. CuPillarPad space

40

Padc.c

Min. TopMetal2 (within dfpad) enclosure of CuPillarPad

7.5

1.19. Sealring

Name

Description

Value (um)

Seal.l

No structures outside sealring boundary allowed

Seal.n

Sealring must be enclosed by an unbroken Passiv ring

1.20. Pin layer rules

Name

Description

Value (um)

Pin.a

Min. Activ enclosure of Activ:pin

0

Pin.b

Min. GatPoly enclosure of GatPoly:pin

0

Pin.e

Min. Metal1 enclosure of Metal1:pin

0

Pin.f.M2

Min. Metal2 enclosure of Metal2:pin

0

Pin.f.M3

Min. Metal3 enclosure of Metal3:pin

0

Pin.f.M4

Min. Metal4 enclosure of Metal4:pin

0

Pin.f.M5

Min. Metal5 enclosure of Metal5:pin

0

Pin.g

Min. TopMetal1 enclosure of TopMetal1:pin

0

Pin.h

Min. TopMetal2 enclosure of TopMetal2:pin

0

1.21. Forbidden layers

Name

Description

Value (um)

forbidden.BiWind

forbidden.BiWind BiWind is forbidden in designs submitted for all 0.13 µm technologies.

forbidden.PEmWind

forbidden.PEmWind PEmWind is forbidden in designs submitted for all 0.13 µm technologies.

forbidden.BasPoly

forbidden.BasPoly BasPoly is forbidden in designs submitted for all 0.13 µm technologies.

forbidden.DeepCo

forbidden.DeepCo DeepCo is forbidden in designs submitted for all 0.13 µm technologies.

forbidden.PEmPoly

forbidden.PEmPoly PEmPoly is forbidden in designs submitted for all 0.13 µm technologies.

forbidden.EmPoly

forbidden.EmPoly EmPoly is forbidden in designs submitted for all 0.13 µm technologies.

forbidden.LDMOS

forbidden.LDMOS LDMOS is forbidden in designs submitted for all 0.13 µm technologies.

forbidden.PBiWind

forbidden.PBiWind PBiWind is forbidden in designs submitted for all 0.13 µm technologies.

forbidden.NoDRC

forbidden.NoDRC NoDRC is forbidden in designs submitted for all 0.13 µm technologies.

forbidden.Flash

forbidden.Flash Flash is forbidden in designs submitted for all 0.13 µm technologies.

forbidden.ColWind

forbidden.ColWind ColWind is forbidden in designs submitted for all 0.13 µm technologies.

Total: 110